Tsarin Sensor Piezoresistive

A cikin wannan firikwensin, an haɗa tsiri mai tsayayya akan diaphragm na silicon monocrystalline ta hanyar haɗin kai don yin guntu piezoresistive na silicon, kuma gefen wannan guntu an daidaita shi a cikin harsashi, kuma ana fitar da wutar lantarki. Firikwensin matsin lamba na Piezoresistive, wanda kuma aka sani da firikwensin matsa lamba-jihar, ya bambanta da ma'aunin maɗauri, wanda ke buƙatar jin ƙarfin waje a kaikaice ta hanyar abubuwan da ke da ƙarfi, amma kai tsaye yana jin ma'aunin da aka auna ta hanyar diaphragm na silicon.

Ɗayan gefe na diaphragm na silicon babban rami ne mai matsa lamba yana sadarwa tare da ma'aunin da aka auna, kuma ɗayan ɓangaren ƙananan ƙananan ƙananan ƙananan ne wanda ke sadarwa tare da yanayi. Gabaɗaya, an tsara diaphragm na silicon a matsayin da'irar tare da ƙayyadaddun yanki, kuma adadin diamita zuwa kauri yana kusan 20 ~ 60. An bazu rassan juriya na ƙazanta guda huɗu a cikin gida akan diaphragm na silicon madauwari kuma an haɗa su cikin cikakkiyar gada, biyu daga cikinsu. suna cikin yankin damuwa mai matsawa kuma sauran biyun suna cikin yankin damuwa mai ƙarfi, waɗanda ke da ma'ana dangane da tsakiyar diaphragm.

Bugu da kari, akwai kuma square silicon diaphragm da silicon shafi firikwensin. Hakanan ana yin firikwensin siliki na silinda da igiyoyi masu tsayayya ta hanyar yaduwa a cikin wani takamaiman jirgin saman silinda na silinda, da igiyoyi masu juriya na danniya guda biyu da raƙuman juriya na matsawa guda biyu suna samar da cikakkiyar gada.

Piezoresistive firikwensin na'urar da aka yi ta hanyar juriya na watsawa akan madaidaicin kayan semiconductor bisa ga tasirin piezoresistive na kayan semiconductor. Za'a iya amfani da madaidaicin sa kai tsaye azaman firikwensin aunawa, kuma ana haɗa juriyar watsawa a cikin ƙasa a cikin hanyar gada.

Lokacin da ƙasa ta lalace ta ƙarfin waje, ƙimar juriya za su canza kuma gada za ta samar da daidaitaccen fitarwa mara daidaituwa. Abubuwan da ake amfani da su (ko diaphragms) da aka yi amfani da su azaman na'urori masu auna firikwensin su ne galibin wafern silicon da wafers na germanium. Silicon piezoresistive na'urori masu auna firikwensin da aka yi da wafers na silicon kamar yadda abubuwa masu mahimmanci sun fi jan hankali sosai, musamman na'urori masu auna firikwensin-jihar don auna matsa lamba da sauri su ne aka fi amfani da su.