Aiwatar da Passat man na yau da kullun matsi na matsi na dogo 06E906051K

1. Hanya don ƙirƙirar firikwensin matsa lamba, wanda ya ƙunshi:

Samar da ma'auni na semiconductor, a cikinsa Layer dielectric na farko, Layer dielectric na farko da na biyu dielectric Layer an kafa akan ma'auni na semiconductor.

Ƙarƙashin farantin wutar lantarki a farkon tsakiyar dielectric Layer, na'urar lantarki ta farko wacce ke kan layi ɗaya da ƙananan farantin wutar lantarki kuma an raba shi.

Haɗin yadudduka;

Ƙirƙirar wani Layer na hadaya sama da farantin iyaka na ƙasa;

Ƙirƙirar farantin lantarki na sama akan farantin dielectric interlayer na farko, layin haɗin haɗin farko da Layer na hadaya;

Bayan kafa Layer na hadaya da kuma kafin kafa farantin na sama, a cikin farkon haɗin haɗin gwiwa

Samar da tsagi na haɗin gwiwa, da kuma cika tsagi na haɗin gwiwa tare da farantin sama don haɗawa ta hanyar lantarki tare da layin haɗin haɗin farko; Ko kuma,

Bayan da aka samar da farantin lantarki na sama, an samar da ramuka masu haɗawa a cikin farantin lantarki na sama da na farko na haɗin haɗin gwiwa, wanda

Ƙirƙirar wani Layer mai haɗawa da farantin lantarki na sama da layin haɗin haɗin farko a cikin tsagi na haɗin;

Bayan an haɗa farantin sama da na farko ta hanyar lantarki ta hanyar haɗin gwiwa, cire Layer na hadaya don samar da rami.

2. Hanyar don ƙirƙirar firikwensin matsa lamba bisa ga da'awar 1, wanda a cikin Layer na farko

Hanyar ƙirƙirar Layer na hadaya akan Layer dielectric interlayer dielectric Layer ya ƙunshi matakai masu zuwa:

Adana wani Layer na kayan hadaya akan farantin dielectric interlayer na farko;

Ƙirƙirar ƙirar kayan hadaya don samar da Layer na hadaya.

3. Hanyar samar da firikwensin matsa lamba bisa ga da'awar 2, inda ake amfani da hoton hoto da zane-zane.

Tsarin kayan hadaya an tsara shi ta hanyar etching.

4. Hanyar kafa firikwensin matsa lamba bisa ga da'awar 3, inda Layer hadaya

Kayan abu shine amorphous carbon ko germanium.

5. Hanyar kafa firikwensin matsa lamba bisa ga da'awar 4, a cikinsa Layer hadaya

Kayan abu shine carbon amorphous;

Etching iskar gas da aka yi amfani da su a cikin aiwatar da etching Layer kayan hadaya sun hada da O2, CO, N2 da Ar;

Ma'auni a cikin aiwatar da etching Layer kayan hadaya sune: kewayon kwarara na O2 shine 18 SCCM ~ 22 SCCM, kuma yawan kwararar CO shine 10%.

Matsakaicin adadin ya tashi daga 90 SCCM zuwa 110 SCCM, yawan kwararar N2 ya tashi daga 90 SCCM zuwa 110 SCCM, da yawan kwararar Ar.

Kewayon shine 90 SCCM ~ 110 SCCM, kewayon matsa lamba shine 90 mtor ~ 110 mtor, kuma ikon son zuciya shine

540w ~ 660w.