Injininarren injiniyoyi na 2CP3-68 1946725 don carter

Hanya don shirya firam ɗin matsin lamba, wanda ya san ta hanyar haɗa waɗannan matakan:

S1, samar da wafer tare da baya na baya da gaban farfajiya; Samar da tsiri na pizoressive tsiri da yanki mai ƙarfi droped a gaban saman saman na wafer; Samar da matsanancin rami mai zurfi ta hanyar etching baya baya na wafer;

S2, nuna takardar tallafi a bayan wafer;

S3, masana'antu na jagorantar ramuka da wayoyi ƙarfe a gaban gefen wafer, da kuma hada tube na Piepsistive don samar da gada mai kyau;

S4, ajiye da samar da Layer Layer a gaban gaban wafer, da kuma buɗe wani ɓangare na payery Layer don samar da yankin ƙarfe. 2. Hanyar masana'antu ta matsi ta hanyar da'awar ta 1, a cikin S11: Bayar da wafer a gaban wani matsi mai mahimmanci a kan wafer; Ana amfani da ion an yi amfani da ion a saman farfajiya, Piezoresistive Trips ne ke kera masana'antu, kuma yankuna masu lamba ana daɗaɗɗa sosai; S13: ajiye da kuma samar da kariya mai kariya a gaban saman wafer; S14: etching da kirkirar matsin lamba a bayan wafer don samar da fim mai mahimmanci fim. 3. Hanyar masana'antu ta matsakaiciyar matsin lamba bisa ga da'awar 1, yayin da wafer shine soi.

A shekarar 1962, Tufte et al. An ƙera A Pizoressive Silisor Silicon Pizoresistive Tube da Tsarin Silicon fim a karon farko, kuma fara binciken game da matsanancin matsin lamba na Piezoressive. A ƙarshen shekarun 1960 da sanyin wasanni guda 1970, bayyanar da fasahar etchant, ion da ke da ƙima da fasahar siliki, wacce ta gabatar da muhimmiyar rawa wajen inganta wasan kwaikwayon na zamani. Tun 1980s, tare da cigaban ci gaban fasahar Micromachining, kamar andargrapic fannoni, ion diddigation an rage, kuma fitarwa tana da kyau kuma wasan kwaikwayon yana da kyau. A lokaci guda, ci gaba da aikace-aikace sabon fasahar Micrromachining suna yin fim ɗin na kauri daga hakkin mai sarrafawa daidai.