Firikwensin matsin lamba na injin 2CP3-68 1946725 don excavator Carter

Hanya don shirya firikwensin matsa lamba, wanda ya ƙunshi matakai masu zuwa:

S1, samar da wafer tare da baya baya da gaban gaba; Ƙirƙirar tsiri mai ɗorewa da wurin tuntuɓar ƙwanƙwasa a saman gaban wafer; Ƙirƙirar rami mai zurfi na matsa lamba ta hanyar etching saman baya na wafer;

S2, ɗaure takardar tallafi a bayan wafer;

S3, kera ramukan gubar da wayoyi na ƙarfe a gefen gaba na wafer, da haɗa ramukan piezoresistive don samar da gadar Wheatstone;

S4, ajiyewa da kafa wani Layer passivation a gaban gaban wafer, da buɗe wani ɓangare na Layer Passivation don samar da yankin kushin ƙarfe. 2. Hanyar masana'anta na firikwensin matsa lamba bisa ga da'awar 1, inda S1 ya ƙunshi matakai masu zuwa: S11: samar da wafer tare da bangon baya da kuma gaban gaba, da ma'anar kauri na fim mai mahimmanci akan wafer; S12: Ana amfani da ion implantation a kan gaban gaban wafer, piezoresistive tube ana kerarre ta wani babban zafin jiki yaduwa tsari, da lamba yankunan suna da karfi doped; S13: ajiyewa da samar da kariya mai kariya a gaban gaban wafer; S14: etching da kafa wani rami mai zurfi na matsin lamba a bayan wafer don samar da fim mai mahimmanci. 3. Hanyar masana'anta na firikwensin matsa lamba bisa ga da'awar 1, inda wafer shine SOI.

A cikin 1962, Tufte et al. ƙera na'urar firikwensin matsin lamba tare da ɗigon siliki piezoresistive tube da tsarin fim ɗin silicon a karon farko, kuma ya fara bincike kan firikwensin matsa lamba na piezoresistive. A karshen shekarun 1960 zuwa farkon shekarun 1970, bayyanar fasahohi guda uku, wato, fasahar siliki anisotropic etching, fasahar dasa ion da fasahar hadewar anodic, sun kawo babban canji ga na'urar firikwensin matsa lamba, wanda ya taka muhimmiyar rawa wajen inganta aikin firikwensin matsa lamba. . Tun daga 1980s, tare da ƙarin ci gaba da fasahar micromachining, irin su anisotropic etching, lithography, diffusion doping, ion implantation, bonding and coating, girman girman firikwensin matsa lamba ya ci gaba da rage, an inganta hankali, kuma fitarwa yana da girma kuma aikin yana da kyau. A lokaci guda, haɓakawa da aikace-aikacen sabbin fasahar micromachining suna sanya kaurin fim ɗin na firikwensin matsa lamba daidai sarrafawa.